Title: Application of Response Surface Methodology to Laser-Induced Breakdown Spectroscopy: Influences of Hardware Configuration
نویسندگان
چکیده
Response Surface Methodology (RSM) was employed to optimise LIBS analysis of single crystal silicon at atmospheric pressure and under vacuum conditions (pressure ~10mbar). Multivariate analysis software (StatGraphics 5.1) was used to design and analyse several multi-level, full factorial RSM experiments. A Quality Factor (QF) was conceived as the response parameter for the experiments, representing the quality of the LIBS spectrum captured for a given hardware configuration. The QF enabled the hardware configuration to be adjusted so that a best compromise between resolution, signal intensity and signal noise could be achieved. The effect on the QF of
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